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"EFEM." Fullformexpand.com, https://www.fullformexpand.com/efem/equipment-front-end-module. Accessed 21 Feb. 2026.
Fullformexpand.com, 2026. "EFEM." Accessed February 21, 2026. https://www.fullformexpand.com/efem/equipment-front-end-module.
"EFEM." (n.d.). Fullformexpand.com. Retrieved February 21, 2026, from https://www.fullformexpand.com/efem/equipment-front-end-module.
EFEM. (2026). Fullformexpand.com. Available at: https://www.fullformexpand.com/efem/equipment-front-end-module (Accessed: 21 February 2026).